IP Library › Granted Patent US 7,144,747
Granted Patent Utility PCT National Stage
US 7,144,747 · Confirmation No. 9458

METHOD FOR THERMALLY TREATING A SUBSTRATE THAT COMPRISES SEVERAL LAYERS

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Quick Facts
Patent No.
US 7,144,747
App. No.
10/487,573
Filed
2004-02-18
Granted
2006-12-05
Pub. No.
US20040209483A1
Examiner
LE, DUNG ANH
Art Unit
2818
PTA
-3 days