Patent Assignment
Reel/Frame 017327/0573
Assignment of Assignor's Interest
Recorded: 2005-12-06
Received: 2005-12-13
Pages: 4
Assignee
MICRONIC LASER SYSTEMS AB
NYTORPSVAGEN 9, TABY, SEX, SE-183 03, SWEDEN
Covered Property
(1)
Phase-shifting optical maskless lithography enabling asics at the 65 and 45 NM nodes
Application:
11/228,022 →