Patent Assignment
Reel/Frame 017339/0059
Assignment of Assignor's Interest
Recorded: 2005-12-08
Pages: 2
Assignor
IMS NANOFABRICATION GMBH
Executed: 2005-09-22
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, 07745 JENA, GERMANY
Covered Property
(1)
Advanced Pattern Definition for Particle-Beam Exposure
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.