Assignment of Assignor's Interest

Recorded: 2006-03-22 Pages: 6

Assignors

LYONS, JOSEPH H.

Executed: 2003-12-22

WHELAN, JOSEPH G.

Executed: 2004-01-08

Assignee

ASML HOLDING N.V.

DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS

Covered Property (1)

System for Automated Focus Measuring of a Lithography Tool

Patent: 7,081,948 →

Application: 11/103,427 →

Publication: US 2005/0179883