Patent Assignment
Reel/Frame 017347/0961
Assignment of Assignor's Interest
Recorded: 2006-03-22
Pages: 4
Assignors
HONDA, KAZUHIRO
Executed: 2006-03-02
ZACH, JOACHIM
Executed: 2006-03-06
NAKAMURA, NATSUKO
Executed: 2006-03-02
UNO, SHINOBU
Executed: 2006-03-02
Assignee
JEOL LTD.
1-2, MUSASHINO 3-CHOME, AKISHIMA, TOKYO, 196-8558, JAPAN
Covered Property
(1)
Method and Apparatus for Automatically Correcting Charged-Particle Beam and Method of Controlling Aberration Corrector for Charged-Particle Beam