Patent Assignment
Reel/Frame 017354/0130
Assignment of Assignor's Interest
Recorded: 2005-12-14
Pages: 2
Assignor
CHEN, ALEX CHI-HENG
Executed: 2005-11-04
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Substrate, Method of Exposing a Substrate, Machine Readable Medium