Patent Assignment
Reel/Frame 017365/0586
Assignment of Assignor's Interest
Recorded: 2005-12-21
Pages: 3
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Projection Optical System and Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.