Patent Assignment
Reel/Frame 017384/0013
Assignment of Assignor's Interest
Recorded: 2005-12-20
Pages: 2
Assignors
OOSAKI, MAYUKA
Executed: 2005-11-24
SHISHIDO, CHIE
Executed: 2005-11-24
KAWADA, HIROKI
Executed: 2005-11-25
MAEDA, TATSUYA
Executed: 2005-11-28
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
2414, NISHISHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Scanning Electron Microscope, Method for Measuring a Dimension of a Pattern Using the Same, and Apparatus for Correcting Difference Between Scanning Electron Microscopes