Patent Assignment
Reel/Frame 017390/0411
Assignment of Assignor's Interest
Recorded: 2005-12-20
Pages: 3
Assignor
KOMATSU, SHIGEKAZU
Executed: 2005-12-07
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Inspection Method and Inspection Apparatus for Inspecting Electrical Characteristics of Inspection Object