Patent Assignment
Reel/Frame 017396/0297
Assignment of Assignor's Interest
Recorded: 2005-12-20
Pages: 3
Assignor
NUMAKURA, MASAHIRO
Executed: 2005-11-24
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Method of Inspecting Substrate Processing Apparatus and Storage Medium Storing Inspection Program for Executing the Method