IP Library Assignment 017407/0537
Patent Assignment
Reel/Frame 017407/0537

ASSIGNMENT OF ASSIGNOR'S INTEREST

Recorded: 2005-12-27 Received: 2006-01-04 Pages: 4
Assignors
CAI, GARY N.
Executed: 2005-11-14
RA, GEUMJOO
Executed: 2005-11-14
KONDRATENKO, SERGUEI I.
Executed: 2005-11-16
REECE, RONALD N.
Executed: 2005-11-21
WAINWRIGHT, LOUIS P.
Executed: 2005-11-21
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MA, 01915-1053, UNITED STATES
Covered Application (1)
SYSTEMS AND METHODS THAT MITIGATE CONTAMINATION AND MODIFY SURFACE CHARACTERISTICS DURING ION IMPLANTATION PROCESSES THROUGH THE INTRODUCTION OF GASES
App. No. 11/273,039