IP Library › Granted Patent US 7,511,287
Granted Patent Utility
US 7,511,287 · Confirmation No. 3385

SYSTEMS AND METHODS THAT MITIGATE CONTAMINATION AND MODIFY SURFACE CHARACTERISTICS DURING ION IMPLANTATION PROCESSES THROUGH THE INTRODUCTION OF GASES

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2023-09-20 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
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2008-04-08 SRNT Examiner's search strategy and results 4 View
2008-04-08 BIB Bibliographic Data Sheet 1 View
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2007-06-22 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
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Quick Facts
Patent No.
US 7,511,287
App. No.
11/273,039
Filed
2005-11-14
Granted
2009-03-31
Pub. No.
US20070075274A1
Art Unit
2881
PTA
0 days