Patent Assignment
Reel/Frame 017457/0948
Assignment of Assignor's Interest
Recorded: 2006-04-12
Pages: 3
Assignors
SUGIYAMA, KAZUHIKO
Executed: 2005-11-15
IKEDA, NOBUKAZU
Executed: 2005-11-15
NISHINO, KOUJI
Executed: 2005-11-15
DOHI, RYOUSUKE
Executed: 2005-11-15
UENOYAMA, TOYOMI
Executed: 2005-11-15
Assignees
FUJIKIN INCORPORATED
3-2, ITACHIBORI 2-CHOME, NISHI-KU, OSAKA-SHI, 550-0012, JAPAN
TOKYO ELECTRON LTD.
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-0052, JAPAN
Covered Property
(1)
Device and Method for Supplying Gas While Dividing to Chamber from Gas Supplying Facility Equipped with Flow Controller