Patent Assignment
Reel/Frame 017500/0570
Assignment of Assignor's Interest
Recorded: 2006-01-23
Pages: 2
Assignors
SHINADA, HIROYUKI
Executed: 2002-06-17
MURAKOSHI, HISAYA
Executed: 2002-06-17
TODOKORO, HIDEO
Executed: 2002-06-25
MAKINO, HIROSHI
Executed: 2002-06-17
ANAN, YOSHIHIRO
Executed: 2002-06-20
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI, 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Apparatus and Method for Wafer Pattern Inspection
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.