Patent Assignment
Reel/Frame 017511/0217
Assignment of Assignor's Interest
Recorded: 2005-07-19
Pages: 2
Assignors
BABA, SHUICHI
Executed: 2005-06-20
NAKATA, TOSHIHIKO
Executed: 2005-06-20
WATANABE, MASAHIRO
Executed: 2005-06-20
ARAI, TAKESHI
Executed: 2005-06-20
Assignee
HITACHI, LTD.
6-6, MARUNOUCHI 1-CHOME, CHIYODA-DU, TOKYO, JAPAN
Covered Property
(1)
Scanning Probe Microscope and Sample Observing Method Using This and Semiconductor Device Production Method