Patent Assignment
Reel/Frame 017530/0789
Assignment of Assignor's Interest
Recorded: 2006-02-02
Pages: 2
Assignors
MATSUSHITA, KIYOHIRO
Executed: 2005-12-21
OHARA, NAOKI
Executed: 2005-12-26
KEMELING, NATHAN R.C.
Executed: 2005-12-21
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, TOKYO 206-0025, JAPAN
Covered Property
(1)
Method of Forming Interconnection in Semiconductor Device