Patent Assignment
Reel/Frame 017536/0693
Assignment of Assignor's Interest
Recorded: 2006-02-07
Pages: 3
Assignor
IIZUKA, HACHISHIRO
Executed: 2005-11-01
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Vaporizer and Semiconductor Processing Apparatus