IP Library Assignment 017550/0263
Patent Assignment
Reel/Frame 017550/0263

Assignment of Assignor's Interest

Recorded: 2006-02-13 Pages: 5
Assignors
FUNK, MERRITT
Executed: 2006-01-04
HORAK, DAVID V.
Executed: 2006-01-19
STRANG, ERIC J.
Executed: 2006-01-04
CHEN, LEE
Executed: 2006-01-24
Assignees
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property (1)
Method and System for Controlling Radical Distribution
Patent: 7,718,030 →
Application: 11/233,025 →
Publication: US 2007/0068625