Patent Assignment
Reel/Frame 017557/0462
Assignment of Assignor's Interest
Recorded: 2006-02-09
Pages: 2
Assignors
NISHIYAMA, HIDETOSHI
Executed: 2006-01-14
FUKUDA, MUNEYUKI
Executed: 2006-01-12
TAKAHASHI, NORISUGU
Executed: 2005-12-23
SATO, MITSUGU
Executed: 2005-12-23
FUKADA, ATSUKO
Executed: 2005-12-22
SUZUKI, NAOMASA
Executed: 2005-12-23
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORAITON
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Inspection Method and Inspection Apparatus Using Charged Particle Beam