Patent Assignment
Reel/Frame 017558/0897
Assignment of Assignor's Interest
Recorded: 2006-04-28
Pages: 2
Assignors
SANO, ATSUSHI
Executed: 2006-04-12
HORII, SADAYOSHI
Executed: 2006-04-12
ITATANI, HIDEHARU
Executed: 2006-04-11
ASAI, MASAYUKI
Executed: 2006-04-12
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTO-KANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Manufacturing Method of Semiconductor Device and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.