Patent Assignment
Reel/Frame 017572/0511
Assignment of Assignor's Interest
Recorded: 2006-05-03
Pages: 3
Assignors
CORMONT, PHILIPPE
Executed: 2006-03-20
THRO, PIERRE-YVES
Executed: 2006-03-20
VACHER, CHARLIE
Executed: 2006-03-20
Assignee
COMMISSARIAT A L'ENERGIE ATOMIQUE
31-33, RUE DE LA FEDERATION, PARIS, 75015, FRANCE
Covered Property
(1)
Method and Device for Lithography by Extreme Ultraviolet Radiation