Patent Assignment
Reel/Frame 017574/0828
Assignment of Assignor's Interest
Recorded: 2006-05-04
Pages: 5
Assignors
CHENG, CHANG YUNG
Executed: 2006-03-02
FU, HSUEH-SHIH
Executed: 2006-03-02
WANG, YING-LANG
Executed: 2006-03-02
CHENG, FAN-TIEN
Executed: 2006-03-02
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method and System for Virtual Metrology in Semiconductor Manufacturing