Assignment of Assignor's Interest

Recorded: 2006-02-16 Pages: 5

Assignors

FEHR, JEAN-NOEL

Executed: 2005-12-21

MANN, HANS-JUERGEN

Executed: 2005-12-12

ZELLNER, JOHANNES

Executed: 2005-11-30

Assignee

CARL ZEISS SMT AG

CARL-ZEISS-STRASSE 22, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Projection Exposure Apparatus and Projection Optical System

Patent: 7,477,355 →

Application: 11/256,164 →

Publication: US 2006/0119822

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.