Patent Assignment
Reel/Frame 017579/0165
Assignment of Assignor's Interest
Recorded: 2006-02-17
Pages: 5
Assignors
TANAKA, SUMI
Executed: 2006-01-05
SAITO, TETSUYA
Executed: 2006-01-05
NATSUHARA, MASUHIRO
Executed: 2006-02-10
NAKATA, HIROHIKO
Executed: 2006-02-10
Assignees
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
SUMITOMO ELECTRIC INDUSTRIES, LTD.
5-33, KITAHAMA 4-CHOME, CHUO-KU, OSAKA-SHI, OSAKA-FU, JAPAN
Covered Property
(1)
Substrate Holding Structure and Substrate Processing Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.