Patent Assignment
Reel/Frame 017581/0129
Assignment of Assignor's Interest
Recorded: 2006-02-21
Pages: 2
Assignor
HANSEN, STEVEN GEORGE
Executed: 2006-01-13
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Lithographic Apparatus and Method for Optimizing Illumination Using a Photolithographic Simulation