Patent Assignment
Reel/Frame 017582/0728
Assignment of Assignor's Interest
Recorded: 2006-05-04
Pages: 17
Assignors
PAREKH, BIPIN S.
Executed: 2006-03-02
SPIEGELMAN, JEFFREY J.
Executed: 2006-04-03
ZELLER, ROBERT S.
Executed: 2006-04-10
HOLMES, RUSSELL J.
Executed: 2006-04-03
Assignee
ENTEGRIS, INC.
3500 LYMAN BOULEVARD, CHASKA, MINNESOTA, 55318
Covered Property
(1)
Lithographic Projection Apparatus, Purge Gas Supply System and Gas Purging Method
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Merger
Jul 28, 2006
From: MYKROLIS CORPORATION
To: ENTEGRIS, INC.
Reel/Frame 018026/0873 →
Security Agreement
Mar 9, 2009
From: ENTEGRIS, INC.
To: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS AGENT
Reel/Frame 022354/0784 →
Release of Security Interest
Aug 17, 2011
From: WELLS FARGO BANK NATIONAL ASSOCIATION
To: ENTEGRIS, INC.
Reel/Frame 026764/0880 →