Patent Assignment
Reel/Frame 017584/0750
Assignment of Assignor's Interest
Recorded: 2006-02-16
Pages: 3
Assignor
MATSUURA, HIROYUKI
Executed: 2006-02-06
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Vertical Batch Processing Apparatus