Patent Assignment
Reel/Frame 017591/0560
Assignment of Assignor's Interest
Recorded: 2006-02-15
Pages: 3
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Resist Composition and Patterning Process