Patent Assignment
Reel/Frame 017592/0200
Assignment of Assignor's Interest
Recorded: 2006-02-16
Pages: 2
Assignors
EMER, WOLFGANG
Executed: 2006-02-15
WEGMANN, ULRICH
Executed: 2006-02-02
SCHRIEVER, MARTIN
Executed: 2006-02-09
HOCH, RAINER
Executed: 2006-02-15
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Optical Measuring Apparatus and Operating Method for Imaging Error Correction in an Optical Imaging System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.