Patent Assignment
Reel/Frame 017594/0193
Assignment of Assignor's Interest
Recorded: 2006-02-21
Pages: 3
Assignors
IWA, YOICHIRO
Executed: 2005-10-27
MIYAKAWA, KAZUHIRO
Executed: 2005-10-27
SAITO, SUSUMU
Executed: 2005-11-24
Assignees
KABUSHIKI KAISHA TOPCON
75-1, HASUNUMA-CHO, ITABASHI-KU, TOKYO 174-8580, JAPAN
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Particle Monitoring Apparatus and Vacuum Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.