Patent Assignment
Reel/Frame 017597/0852
Assignment of Assignor's Interest
Recorded: 2006-02-16
Pages: 2
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-CHO 1-1, TERANOUCHI-AGARU, 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus for Treating Substrate with Predetermined Processing by Supplying Processing Liquid to Rim Portion of Rotating Substrate
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.