Assignment of Assignor's Interest

Recorded: 2006-02-28 Pages: 2

Assignors

WEGMANN, ULRICH

Executed: 2005-12-19

HAIDNER, HELMUT

Executed: 2005-12-15

Assignee

CARL ZEISS SMT AG

CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY

Covered Property (1)

Method of Manufacturing a Miniaturized Device

Patent: 7,623,218 →

Application: 11/282,154 →

Publication: US 2006/0139583

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.