Patent Assignment
Reel/Frame 017637/0466
Assignment of Assignor's Interest
Recorded: 2006-05-18
Pages: 3
Assignor
CLARK, ROBERT D.
Executed: 2006-04-06
Assignee
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME, MINATO-KU, TBS BROADCAST CENTER, TOKYO, 107, JAPAN
Covered Property
(1)
Method of Forming Mixed Rare Earth Nitride and Aluminum Nitride Films by Atomic Layer Deposition