Assignment of Assignor's Interest

Recorded: 2006-03-15 Pages: 3

Assignor

LANDRIGAN, THOMAS

Executed: 2006-03-15

Assignee

AXCELIS TECHNOLOGIES, INC.

108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915

Covered Property (1)

Thermal chuck and processes for manufacturing the thermal chuck

Application: 11/377,841 →

Publication: US 2007/0214631

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.