Patent Assignment
Reel/Frame 017661/0554
Assignment of Assignor's Interest
Recorded: 2006-05-10
Pages: 4
Assignee
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME, MINATO-KU, TBS BROADCAST CENTER, TOKYO, 107, JAPAN
Covered Property
(1)
System for Introducing a Precursor Gas to a Vapor Deposition System