Patent Assignment
Reel/Frame 017682/0075
Assignment of Assignor's Interest
Recorded: 2006-03-10
Pages: 2
Assignors
USUI, TATEHITO
Executed: 2006-03-07
JOO, KAZUHIRO
Executed: 2006-03-06
FUJII, TAKASHI
Executed: 2006-03-06
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
1-24-14, NISHI SHIMBASHI, MINATO-KU, TOKYO, 105-8717, JAPAN
Covered Property
(1)
Plasma Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.