Patent Assignment
Reel/Frame 017683/0036
Assignment of Assignor's Interest
Recorded: 2006-03-10
Pages: 3
Assignor
HATAKEYAMA, JUN
Executed: 2006-01-24
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Photoresist Undercoat-Forming Material and Patterning Process