Patent Assignment
Reel/Frame 017687/0701
Assignment of Assignor's Interest
Recorded: 2006-03-14
Pages: 2
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Projection Exposure System and Method of Manufacturing a Miniaturized Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.