Patent Assignment
Reel/Frame 017693/0217
Assignment of Assignor's Interest
Recorded: 2006-05-30
Pages: 2
Assignors
PANDHUMSOPORN, TAMARAK
Executed: 2006-05-17
COFER, ALFERD
Executed: 2006-05-17
BOSCH, WILLIAM
Executed: 2006-05-17
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods for Minimizing Mask Undercuts and Notches for Plasma Processing System