Patent Assignment
Reel/Frame 017714/0883
Assignment of Assignor's Interest
Recorded: 2006-03-27
Pages: 2
Assignor
NAKANO, RYU
Executed: 2006-03-23
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, TOKYO 206-0025, JAPAN
Covered Property
(1)
Method of Forming Organosilicon Oxide Film and Multilayer Resist Structure