Patent Assignment
Reel/Frame 017727/0559
Assignment of Assignor's Interest
Recorded: 2006-03-24
Pages: 3
Assignors
HASEGAWA, NORIYASU
Executed: 2006-03-16
HAYASHI, TATSUYA
Executed: 2006-03-16
MIYAJIMA, YOSHIKAZU
Executed: 2006-03-16
Assignee
CANON KABUSHIKI KAISHA
3-30-2, SHIMOMARUKO, TOKYO, JAPAN
Covered Property
(1)
Exposure Apparatus and Device Manufacturing Method