Patent Assignment
Reel/Frame 017734/0931
Assignment of Assignor's Interest
Recorded: 2006-03-28
Pages: 3
Assignor
OGASAWARA, MASAHIRO
Executed: 2006-03-22
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Plasma Etching Method, Plasma Etching Apparatus, Control Program, Computer Recording Medium and Recording Medium Having Processing Recipe Recorded Thereon