Patent Assignment
Reel/Frame 017736/0715
Assignment of Assignor's Interest
Recorded: 2006-03-29
Pages: 3
Assignor
MORIWAKA, TOMOAKI
Executed: 2006-03-22
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Beam Homogenizer and Laser Irradiation Apparatus