Patent Assignment
Reel/Frame 017739/0273
Assignment of Assignor's Interest
Recorded: 2006-03-30
Pages: 3
Assignor
OGAWA, HIROSHI
Executed: 2006-03-20
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Plasma Processing Method and Apparatus, and Autorunning Program for Variable Matching Unit