Patent Assignment
Reel/Frame 017750/0325
Assignment of Assignor's Interest
Recorded: 2006-03-31
Pages: 3
Assignors
MATSUMOTO, NAOKI
Executed: 2006-03-17
KOSHIMIZU, CHISHIO
Executed: 2006-03-17
KOSHIISHI, AKIRA
Executed: 2006-03-17
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Capacitive Coupling Plasma Processing Apparatus and Method for Using the Same