Patent Assignment
Reel/Frame 017762/0526
Assignment of Assignor's Interest
Recorded: 2006-04-05
Pages: 4
Assignors
BALSEANU, MIHAELA
Executed: 2006-03-31
XIA, LI-QUN
Executed: 2006-03-31
ZUBKOV, VALDIMIR
Executed: 2006-03-31
SHEK, MEI-YEE
Executed: 2006-04-03
ROLFOX, ISABELITA
Executed: 2006-03-31
M'SAAD, HICHEM
Executed: 2006-03-31
Assignee
APPLIED MATERIALS, INC.
LEGAL AFFAIRS DEPARTMENT, P.O. BOX 450A, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Method to Increase the Compressive Stress of Pecvd Silicon Nitride Films