Patent Assignment
Reel/Frame 017762/0897
Assignment of Assignor's Interest
Recorded: 2006-06-12
Pages: 12
Assignors
SUZUKI, KENJI
Executed: 2006-05-18
GOMI, ATSUSHI
Executed: 2006-05-18
HARA, MASAMICHI
Executed: 2006-05-18
MIZUSAWA, YASUSHI
Executed: 2006-05-30
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER, 3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107, JAPAN
Covered Property
(1)
Method and Apparatus for Reducing Particle Contamination in a Deposition System