Patent Assignment
Reel/Frame 017788/0851
Assignment of Assignor's Interest
Recorded: 2006-04-17
Pages: 3
Assignees
CANON KABUSHIKI KAISHA
3-30-2, SHIMOMARUKO, OHTA-KU, TOKYO, JAPAN
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Aberration Adjusting Method, Device Fabrication Method, and Charged Particle Beam Lithography Machine
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.