Patent Assignment
Reel/Frame 017800/0578
Assignment of Assignor's Interest
Recorded: 2006-04-20
Pages: 2
Assignor
KEMPEN, ANTONIUS THEODORUS WILHELMUS
Executed: 2006-04-10
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Method for Chemical Reduction of an Oxidized Contamination Material, or Reducing Oxidation of a Contamination Material and a Conditioning System for Doing the Same