Assignment of Assignor's Interest

Recorded: 2006-06-16 Pages: 4

Assignors

RAU, JOHANNES

Executed: 2006-05-16

DISTL, JOSEF

Executed: 2006-06-06

SCHOEPPACH, ARMIN

Executed: 2006-05-19

HOLDERER, HUBERT

Executed: 2006-05-15

Assignee

CARL ZEISS SMT AG

CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY

Covered Property (1)

Process for Connecting an Optical Element of a Microlithographic Projection Exposure Apparatus to a Mount, and Assembly

Patent: 7,551,375 →

Application: 11/386,236 →

Publication: US 2006/0243779

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.